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CST Clean Surface Technology Co.

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Photoresist
Photoresist
Type
Photoresist

AZP
AZP1350

GRX
GRX-M220

AZ1500
AZ1500

AZPFF
AZP1350 Fringe Free

GRXFF
GRX-M220 Fringe Free

AZ1500FF
AZ1500 Fringe Free


Quality assurance area of PR

Normal
Plate size - 0.5inchesΦ

Fringe Free
基板サイズ - 0.5inches□


PR thickness

5000Å 5400Å 7000Å 10000Å

CST established two ways of coating by spinning even for the larger square substrate. Widely expanded patterning area to minimize the swelling part of peripheral fringe area, with "FS"(fringe Small). Now it covers size up to 800×960 as our product.
And "FF"(Fringe Free) is available for a scale like 1:25(ratio of side length) rectangle substrate or giant substrate besides LCD mask size.

Nomal Type

Fringe Free


Fringe Small

>>[to reference] FS image






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