powered by Google

CST Clean Surface Technology Co.

japanese
english
contact us
handling tool


handling tool for small size
It is what began it all when a custmer see our small handling tool for internal use.
Customer needs handling tool for round, disc, or bigger plate.

handling tool for square plate
type

photo photo
photo photo


handling tool for disk plate
photo photo
photo photo
photo photo


handling tool for the horizontal
type

type
type
type

CST-6025SH
Specially designed for the horizontal motion as handling substrate from reticle case to inspection machine or exposure device. Nodifficulty when mask has a pellicle. Safe type with side holding gripper.
Total weight: 126g
Compact and reducing user's workload.

[Operating procedure]
1Keep at the center of plate
2Lock the ring
3Operetion
4Work
3Unlock the ring
4Remove the tool


[Extended image of gripper]
 

handling tool for large plate
Ever since CST's handling tool was born 28 years ago, it has become a necessity for the person who carry plates.
They are so ubiquitous as to use while polishing, rinsing, inspecting, and (re-)loading to machine.
You can easily get substrates in and out of the case or set them to devices only with edge hold.
With handling tools UJ0 to UJ8, you can treat substrates with ease.

UJ0
Tool for get substrates in and out of the case vertically. 600mm to 1400mm size are available.
UJ0


UJ1
Multi-purpose tool such as in and out of a case, or during inspection. Also you can use for setting plate to machine with horizontal movement.
UJ1


UJ2
UJ2 is a combination of UJ1s by shoulder width. Commonly used for loading substrate filmly.
UJ2


UJ3
Convenient tool for handling large or heavy substrate. Also lift horizontal substrate up to carry.
UJ3


UJ6
Adding more 2 places to hold tightly and stable with UJ3. You can use for dipping plate with long grip as shown in the photo below.
UJ6


UJ8
You can carry heavy G8(over 45kg) substrate firmly and safly with grasping 2 places in both sides.
UJ8







page top